Kr/sup +/ laser-induced chemical vapor deposition of W
Kr/sup +/ laser-induced pyrolytic direct writing of W stripes by H/sub 2/ reduction of WF/sub 6/ has been investigated. The reproducibility of the process and the morphology and electrical properties of deposits depend heavily on the partial pressures of both WF/sub 6/ and H/sub 2/; the best results have been obtained with p(WF/sub 6/) = 5 mbar and 100 mbarless than or equal top(H/sub 2/)less than or equal to800 mbar. For a laser focus of 2w/sub 0/ = 7 ..mu..m and laser powers between 30 and 200 mW, the widths of stripes varied between 1.5 and 15 ..mu..m with corresponding thicknesses between 0.1 to 3 ..mu..m. The width of stripes is independent of the scanning speed within the range 20 ..mu..m/sless than or equal toV/sub s/ less than or equal to400 ..mu..m/s. The electrical resistivities of these stripes were about a factor of 1.3--2.3 larger than the bulk value.
- Research Organization:
- Angewandte Physik, Johannes-Kepler-Universitaet Linz, A-4040 Linz, Austria
- OSTI ID:
- 6512583
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 62:2
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
QUARTZ
VAPOR DEPOSITED COATINGS
SILICON
TUNGSTEN
CHEMICAL VAPOR DEPOSITION
ELECTRIC CONDUCTIVITY
MORPHOLOGY
TUNGSTEN FLUORIDES
DECOMPOSITION
PYROLYSIS
GLASS
HYDROGEN
KRYPTON IONS
LASER-RADIATION HEATING
THICKNESS
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL COATING
CHEMICAL REACTIONS
COATINGS
DEPOSITION
DIMENSIONS
ELECTRICAL PROPERTIES
ELEMENTS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HEATING
IONS
METALS
MINERALS
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PLASMA HEATING
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICON COMPOUNDS
SILICON OXIDES
SURFACE COATING
THERMOCHEMICAL PROCESSES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN COMPOUNDS
360101* - Metals & Alloys- Preparation & Fabrication
360102 - Metals & Alloys- Structure & Phase Studies
360104 - Metals & Alloys- Physical Properties