Detailed characterization of TiC and TiN coatings prepared by the activated reactive evaporation process
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
The objective is to investigate the relationship between the composition, microstructure, and microhardness of TiC and TiN coatings prepared over a range of process parameters using the activated reactive evaporation process. The composition was measured by Auger electron spectroscopy. The phase relationships and preferred orientation were obtained by x-ray diffraction analysis. Microhardness and adhesion of the coatings were measured. The results show that the microhardness depends on the composition/stoichiometry, phases present, the preferred orientation, and possibly the grain size in the case of single-phase coatings.
- Research Organization:
- University of California, Los Angeles, California 90024
- OSTI ID:
- 6511981
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ADHESION
CARBIDES
CARBON COMPOUNDS
CHEMICAL COMPOSITION
COATINGS
CRYSTAL STRUCTURE
EVAPORATION
GRAIN SIZE
HARDNESS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
MORPHOLOGY
NITRIDES
NITROGEN COMPOUNDS
ORIENTATION
PHASE TRANSFORMATIONS
PNICTIDES
SIZE
STOICHIOMETRY
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
TRIBOLOGY
WEAR
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ADHESION
CARBIDES
CARBON COMPOUNDS
CHEMICAL COMPOSITION
COATINGS
CRYSTAL STRUCTURE
EVAPORATION
GRAIN SIZE
HARDNESS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
MORPHOLOGY
NITRIDES
NITROGEN COMPOUNDS
ORIENTATION
PHASE TRANSFORMATIONS
PNICTIDES
SIZE
STOICHIOMETRY
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
TRIBOLOGY
WEAR