Novel photochemical vapor deposition reactor for amorphous silicon solar cell deposition

Journal Article · Mon Jul 13 00:00:00 EDT 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98592· OSTI ID:6511250

Rocheleau, R E; Hegedus, S S; Buchanan, W A; Jackson, S C

A novel photochemical vapor deposition (photo-CVD) reactor having a flexible ultraviolet-transparent Teflon curtain and a secondary gas flow to eliminate deposition on the window has been used to deposit amorphous silicon films and p-i-n solar cells. The background levels of atmospheric contaminants (H/sub 2/O, CO/sub 2/, N/sub 2/) depend strongly on the vacuum procedures but not on the presence of a Teflon curtain in the reactor. Intrinsic films with a midgap density of states of 3 x 10/sup 15/ eV/sup -1/ cm/sup -3/ and all-photo-CVD pin solar cells with efficiencies of 8.5% have been deposited.

• Research Organization: Institute of Energy Conversion, University of Delaware, Newark, Delaware 19716
• OSTI ID: 6511250
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 51:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
14 SOLAR ENERGY
CHEMICAL VAPOR DEPOSITION
CHEMICAL REACTORS
PHOTOCHEMISTRY
SILICON
SILICON SOLAR CELLS
EFFICIENCY
FABRICATION
CARBON DIOXIDE
ENERGY-LEVEL DENSITY
GAS FLOW
NEON
P-N JUNCTIONS
TEFLON
WATER
CARBON COMPOUNDS
CARBON OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMISTRY
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FLUID FLOW
FLUIDS
FLUORINATED ALIPHATIC HYDROCARBONS
GASES
HALOGENATED ALIPHATIC HYDROCARBONS
HYDROGEN COMPOUNDS
JUNCTIONS
MATERIALS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC POLYMERS
OXIDES
OXYGEN COMPOUNDS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASTICS
POLYETHYLENES
POLYMERS
POLYOLEFINS
POLYTETRAFLUOROETHYLENE
RARE GASES
SEMICONDUCTOR JUNCTIONS
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
SYNTHETIC MATERIALS
360601* - Other Materials- Preparation & Manufacture
140501 - Solar Energy Conversion- Photovoltaic Conversion