Acoustic wave device using plate modes with surface-parallel displacement
Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them. 6 figs.
- Research Organization:
- AT and T Technologies, Inc., Greensboro, NC (USA)
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- US Dept. of Energy
- Patent Number(s):
- PATENTS-US-A7187776
- Application Number:
- ON: DE89009719
- OSTI ID:
- 6473047
- Resource Relation:
- Other Information: Paper copy only, copy does not permit microfiche production
- Country of Publication:
- United States
- Language:
- English
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