Evaluation of environmental control equipment for thin film silicon photovoltaic cell processing: Phase I
Technical Report
·
OSTI ID:6466295
Thin film silicon:hydrogen alloys are commanding an increasing share of the photovoltaic marketplace. Due to the hazardous nature of the materials involved in their manufacture, it is important to control and render harmless those reactants that are not consumed as inert coating. Environmental control equipment used for such purposes must meet important safety, throughput, efficiency, and reliability requirements. This report discusses the analytical methodology and performance results obtained for various environmental systems evaluated at a photovoltaic research facility.
- Research Organization:
- Brookhaven National Lab., Upton, NY (USA)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 6466295
- Report Number(s):
- BNL-39694; ON: DE87010044
- Resource Relation:
- Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
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EFFICIENCY
RESEARCH PROGRAMS
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99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
HEALTH HAZARDS
SILICON SOLAR CELLS
FABRICATION
EFFICIENCY
RESEARCH PROGRAMS
SAFETY
THIN FILMS
DIRECT ENERGY CONVERTERS
EQUIPMENT
FILMS
HAZARDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion
570000 - Health & Safety