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Title: Evaluation of environmental control equipment for thin film silicon photovoltaic cell processing: Phase I

Technical Report ·
OSTI ID:6466295

Thin film silicon:hydrogen alloys are commanding an increasing share of the photovoltaic marketplace. Due to the hazardous nature of the materials involved in their manufacture, it is important to control and render harmless those reactants that are not consumed as inert coating. Environmental control equipment used for such purposes must meet important safety, throughput, efficiency, and reliability requirements. This report discusses the analytical methodology and performance results obtained for various environmental systems evaluated at a photovoltaic research facility.

Research Organization:
Brookhaven National Lab., Upton, NY (USA)
DOE Contract Number:
AC02-76CH00016
OSTI ID:
6466295
Report Number(s):
BNL-39694; ON: DE87010044
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English