Preparation and properties of tin-doped indium oxide thin films by thermal decomposition of organometallic compounds
Journal Article
·
· Mater. Res. Bull.; (United States)
Transparent and conductive tin-doped indium oxide thin films were prepared on soda-lime and quartz glass substrates by thermal decomposition of organometallic compounds. The optical transmittance of the films was 90% in the visible region. The electric resistivity changed from 6-8 x 10/sup 3-/ ..cap omega..-cm to 3-4 x 10/sup -2/ ..cap omega..-cm, depending on composition and, after annealing in vacuum, it decreased by a factor of 2-10.
- Research Organization:
- Dept. of Applied Chemistry, Faculty of Engineering, Hokkaido Univ., Sapporo 060
- OSTI ID:
- 6452802
- Journal Information:
- Mater. Res. Bull.; (United States), Vol. 21:8
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
GLASS
FABRICATION
INDIUM OXIDES
CHEMICAL PREPARATION
CRYSTAL DOPING
ELECTRIC CONDUCTIVITY
OPTICAL PROPERTIES
THERMAL DEGRADATION
ANNEALING
DOPED MATERIALS
OPACITY
ORGANOMETALLIC COMPOUNDS
QUARTZ
SODIUM COMPOUNDS
SUBSTRATES
THIN FILMS
TIN
VACUUM SYSTEMS
ALKALI METAL COMPOUNDS
CHALCOGENIDES
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
HEAT TREATMENTS
INDIUM COMPOUNDS
MATERIALS
METALS
MINERALS
ORGANIC COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SILICON COMPOUNDS
SILICON OXIDES
SYNTHESIS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
360601 - Other Materials- Preparation & Manufacture
360603 - Materials- Properties
GLASS
FABRICATION
INDIUM OXIDES
CHEMICAL PREPARATION
CRYSTAL DOPING
ELECTRIC CONDUCTIVITY
OPTICAL PROPERTIES
THERMAL DEGRADATION
ANNEALING
DOPED MATERIALS
OPACITY
ORGANOMETALLIC COMPOUNDS
QUARTZ
SODIUM COMPOUNDS
SUBSTRATES
THIN FILMS
TIN
VACUUM SYSTEMS
ALKALI METAL COMPOUNDS
CHALCOGENIDES
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
HEAT TREATMENTS
INDIUM COMPOUNDS
MATERIALS
METALS
MINERALS
ORGANIC COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SILICON COMPOUNDS
SILICON OXIDES
SYNTHESIS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
360601 - Other Materials- Preparation & Manufacture
360603 - Materials- Properties