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Title: Quick-acting electron-optical lenses

Abstract

A description is given of an electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.

Inventors:
Publication Date:
OSTI Identifier:
6416362
Patent Number(s):
US 4245159
Assignee:
Hell, Dr-Ing Rudolf Gmbh (Germany, Federal Republic Of)
Resource Type:
Patent
Resource Relation:
Patent Priority Date: Priority date 25 Nov 1977, German, Federal Republic of (F.R. Germany)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ELECTROMAGNETIC LENSES; DESIGN; ELECTRON BEAMS; FOCUSING; ELECTRON MICROSCOPES; BEAMS; LENSES; LEPTON BEAMS; MICROSCOPES; PARTICLE BEAMS; 420200* - Engineering- Facilities, Equipment, & Techniques

Citation Formats

Beisswenger, S. Quick-acting electron-optical lenses. United States: N. p., 1981. Web.
Beisswenger, S. Quick-acting electron-optical lenses. United States.
Beisswenger, S. 1981. "Quick-acting electron-optical lenses". United States.
@article{osti_6416362,
title = {Quick-acting electron-optical lenses},
author = {Beisswenger, S},
abstractNote = {A description is given of an electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.},
doi = {},
url = {https://www.osti.gov/biblio/6416362}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 13 00:00:00 EST 1981},
month = {Tue Jan 13 00:00:00 EST 1981}
}