Quick-acting electron-optical lenses
Abstract
A description is given of an electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.
- Inventors:
- Publication Date:
- OSTI Identifier:
- 6416362
- Patent Number(s):
- US 4245159
- Assignee:
- Hell, Dr-Ing Rudolf Gmbh (Germany, Federal Republic Of)
- Resource Type:
- Patent
- Resource Relation:
- Patent Priority Date: Priority date 25 Nov 1977, German, Federal Republic of (F.R. Germany)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; ELECTROMAGNETIC LENSES; DESIGN; ELECTRON BEAMS; FOCUSING; ELECTRON MICROSCOPES; BEAMS; LENSES; LEPTON BEAMS; MICROSCOPES; PARTICLE BEAMS; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Beisswenger, S. Quick-acting electron-optical lenses. United States: N. p., 1981.
Web.
Beisswenger, S. Quick-acting electron-optical lenses. United States.
Beisswenger, S. 1981.
"Quick-acting electron-optical lenses". United States.
@article{osti_6416362,
title = {Quick-acting electron-optical lenses},
author = {Beisswenger, S},
abstractNote = {A description is given of an electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.},
doi = {},
url = {https://www.osti.gov/biblio/6416362},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 13 00:00:00 EST 1981},
month = {Tue Jan 13 00:00:00 EST 1981}
}
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