Process for producing high purity silicon nitride by the direct reaction between elemental silicon and nitrogen-hydrogen liquid reactants
A process is disclosed for producing, at a low temperature, a high purity reaction product consisting essentially of silicon, nitrogen, and hydrogen which can then be heated to produce a high purity alpha silicon nitride. The process comprises: reacting together a particulate elemental high purity silicon with a high purity nitrogen-hydrogen reactant in its liquid state (such as ammonia or hydrazine) having the formula: N/sub n/H/sub (n+m)/ wherein: n = 1--4 and m = 2 when the nitrogen-hydrogen reactant is straight chain, and 0 when the nitrogen-hydrogen reactant is cyclic. High purity silicon nitride can be formed from this intermediate product by heating the intermediate product at a temperature of from about 1200--1700/degree/C for a period from about 15 minutes up to about 2 hours to form a high purity alpha silicon nitride product. The discovery of the existence of a soluble Si/endash/N/endash/H intermediate enables chemical pathways to be explored previously unavailable in conventional solid-state approaches to silicon-nitrogen ceramics
- Research Organization:
- Rockwell International Corp., Canoga Park, CA (United States)
- DOE Contract Number:
- FG03-85ER45221
- Assignee:
- Dept. of Energy
- Patent Number(s):
- PATENTS-US-A7096577
- Application Number:
- ON: DE89011782
- OSTI ID:
- 6300802
- Resource Relation:
- Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SILICON NITRIDES
SYNTHESIS
AMMONIA
CHEMICAL REACTIONS
HYDROGEN
INVENTIONS
NITROGEN
PARTICLE SIZE
REACTION INTERMEDIATES
SILICON
VERY HIGH TEMPERATURE
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
PNICTIDES
SEMIMETALS
SILICON COMPOUNDS
SIZE
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication