Quantitative Infrared Determination of Composition and Properties of Borophosphosilicate Glass (BPSG) Thin Films Using Multivariate Calibration

Conference · Wed Sep 12 00:00:00 EDT 1990

OSTI ID:6288187

McGuire, J. A. ^[1]; Adhihetty, I. S. ^[1]; Niemczyk, T. M. ^[1]; Haaland, D. M. ^[2]; Taylor, D. F. ^[2]; Blankenship, D. M. ^[2]; Iben, G. R. ^[2]

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1. Univ. of New Mexico, Albuquerque, NM (United States)
2. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Partial least squares multivariate calibration methods were applied to the infrared spectra of a new set of borophosphosilicate glass (BPSG) thin films on silicon wafers. The calibration samples were prepared by a low pressure chemical vapor deposition (LPCVD) process. The statistically designed calibration set included data from nearly 400 coated Si wafers. Calibrations were attempted for properties such as dopant concentrations, thickness, etch rate, film stress, and electrical parameters. It was found that annealed films were predicted more precisely than unannealed films. B, P, and thickness measurements yielded the most precise results by these techniques. Multivariate calibration methods applied to etch rate for annealed films and unannealed film stress provided some limited predictive ability. The detection and removal of outliers greatly improved the analysis precisions. Finally, within wafer and between wafer dopant uniformity may be responsible for degrading the precision of these analytical methods.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6288187
• Report Number(s): SAND-90-2064C; CONF-910311-1; ON: DE90017030
• Resource Relation: Conference: 42. Pittsburgh Conference and Exposition on Analytical Chemistry and Applied Spectroscopy, Chicago, IL (United States), 4-8 Mar 1991
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BOROPHOSPHATE GLASS
QUANTITATIVE CHEMICAL ANALYSIS
BOROSILICATE GLASS
CALIBRATION
CHEMICAL PROPERTIES
CHEMICAL VAPOR DEPOSITION
INFRARED SPECTRA
PHYSICAL PROPERTIES
THICKNESS
THIN FILMS
CHEMICAL ANALYSIS
CHEMICAL COATING
DEPOSITION
DIMENSIONS
FILMS
GLASS
SPECTRA
SURFACE COATING
360603* - Materials- Properties
360601 - Other Materials- Preparation & Manufacture