Superconducting YBa sub 2 Cu sub 3 O sub 7 minus x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

Journal Article · Mon Jan 07 00:00:00 EST 1991 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104400· OSTI ID:6260229

Zhao, J; Li, Y Q; Chern, C S; Norris, P; Gallois, B; Kear, B; Wessels, B W ^[1]

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1. Emcore Corporation, 35 Elizabeth Avenue, Somerset, New Jersey 08873 (US)

An {ital in} {ital situ} microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly {ital c}-axis oriented YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740 {degree}C in about 270 Pa of N{sub 2}O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high {ital T}{sub {ital c}}) phase. X-ray diffraction measurements reveal that the films deposited at 740 {degree}C have highly preferential orientation of the crystallite {ital c} axes perpendicular to the substrate surface.

• OSTI ID: 6260229
• Journal Information: Applied Physics Letters; (USA), Vol. 58:1; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
CHEMICAL VAPOR DEPOSITION
COPPER OXIDES
YTTRIUM OXIDES
HIGH-TC SUPERCONDUCTORS
MAGNETIC SUSCEPTIBILITY
ORGANOMETALLIC COMPOUNDS
SUPERCONDUCTING FILMS
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COHERENT SCATTERING
COPPER COMPOUNDS
DEPOSITION
DIFFRACTION
FILMS
MAGNETIC PROPERTIES
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
SUPERCONDUCTORS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication