Double Langmuir probe diagnostic of a resonant cavity microwave discharge

Journal Article · Thu Jul 01 00:00:00 EDT 1993 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.578457· OSTI ID:6241700

McColl, W; Brooks, C; Brake, M L ^[1]

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1. Department of Nuclear Engineering, University of Michigan, Ann Arbor, Michigan 48109-2104 (United States)

An Asmussen resonant cavity operating at 2.45 GHz provides the basis for the application of probe theory to a microwave discharge. A double Langmuir probe is inserted into a discharge produced by a microwave resonant cavity. Typical operating pressures range from 0.5 to 50 Torr in helium, with continuous wave microwave powers ranging from 60 to 120 W at 2.45 GHz. Typical probe data indicates electron densities in the range of 10[sup 11]--10[sup 12] cm[sup [minus]3] with electron temperatures of 5 to 20 eV. The probe data is compared with the results of a model based upon the electromagnetics of the discharge.

• OSTI ID: 6241700
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Vol. 11:4; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
HIGH-FREQUENCY DISCHARGES
PLASMA DIAGNOSTICS
LANGMUIR PROBE
CAVITY RESONATORS
ELECTRON DENSITY
ELECTRON TEMPERATURE
HELIUM
ELECTRIC DISCHARGES
ELECTRIC PROBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
NONMETALS
PROBES
RARE GASES
RESONATORS
700320* - Plasma Diagnostic Techniques & Instrumentation- (1992-)