Modifications in the phase transition properties of predeposited VO/sub 2/ films

Journal Article · Mon Oct 01 00:00:00 EDT 1984 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572462· OSTI ID:6223979

Case, F C

Thin films of the phase transition material vanadium dioxide (VO/sub 2/) were deposited by thermal oxidation of e-beam evaporated vanadium on a variety of bulk materials. Substrate effects on transition temperature are confirmed as being due to a mismatch between film and substrate thermal expansion coefficients. Decreasing tensile stress results in a lowering of VO/sub 2/ transition temperature. Effects of low-energy Ar/sup +/ bombardment on the electrical and optical properties of these predeposited VO/sub 2/ films were investigated. Bombardment energies in the range 138--500 eV at 1.0--1.3 mA/cm/sup 2/ for 120--180 s were provided by a Commonwealth Millatron. The higher Ar/sup +/ energies resulted in collapse of the VO/sub 2/ optical transmittance hysteresis loop, while low-energy Ar/sup +/ ions caused both a downward shift in the transition temperature and a decrease in hysteresis loop width, suggesting a dependence of these quantities on intrinsic stress. In addition, large decreases in cold-state resistivity are reported and attributed to a reduction of the surface oxide by the low energy argon beam.

• Research Organization: LTV Aerospace and Defense Company, Vought Missiles and Advanced Programs Division, Research Department, Dallas, Texas 75265
• OSTI ID: 6223979
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 2:4
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
VANADIUM OXIDES
PHASE TRANSFORMATIONS
PHYSICAL RADIATION EFFECTS
ARGON IONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAMS
EV RANGE
HYSTERESIS
ION COLLISIONS
LIGHT TRANSMISSION
OPTICAL PROPERTIES
OXIDATION
PHASE STUDIES
STRESSES
TENSILE PROPERTIES
THERMAL EXPANSION
TRANSITION TEMPERATURE
VACUUM EVAPORATION
VANADIUM
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL REACTIONS
COLLISIONS
ELEMENTS
ENERGY RANGE
EVAPORATION
EXPANSION
IONS
LEPTON BEAMS
MECHANICAL PROPERTIES
METALS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHYSICAL PROPERTIES
RADIATION EFFECTS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
VANADIUM COMPOUNDS
360605* - Materials- Radiation Effects