Epitaxial growth of high-temperature superconducting thin films

Journal Article · Wed Mar 01 00:00:00 EST 1989 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.584741· OSTI ID:6152443

Eckstein, J N; Schlom, D G; Hellman, E S; von Dessonneck, K E; Chen, Z J; Webb, C; Turner, F; Harris, Jr, J S; Beasley, M R; Geballe, T H; others, and

We report the development of molecular-beam epitaxy (MBE) techniques for the growth of high-temperature, perovskite-like superconductors. The use of a plasma source of active oxygen allows the in situ growth of such layers. Some of the films grown this way were superconducting as grown. Smooth films exhibiting streaked reflection high-energy electron diffraction (RHEED) patterns, were obtained by using shuttering to kinetically control the growth process. We also report initial results of experiments in which kinetic control is used to layer metastable, nonequilibrium structures in the bismuthstrontium--calcium--copper--oxide system.

• Research Organization: Electrical and Computer Engineering and Materials Departments, University of California, Santa Barbara, California 93106
• OSTI ID: 6152443
• Journal Information: J. Vac. Sci. Technol., B; (United States), Vol. 7:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BISMUTH OXIDES
MOLECULAR BEAM EPITAXY
CALCIUM OXIDES
COPPER OXIDES
OPTIMIZATION
STRONTIUM OXIDES
ELECTRON DIFFRACTION
IN-SITU PROCESSING
MORPHOLOGY
PEROVSKITES
POLYCRYSTALS
SUPERCONDUCTING FILMS
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
CALCIUM COMPOUNDS
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
CRYSTALS
DIFFRACTION
EPITAXY
FILMS
OXIDES
OXYGEN COMPOUNDS
PROCESSING
SCATTERING
STRONTIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies
656100 - Condensed Matter Physics- Superconductivity