Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists

Patent · Tue Nov 25 00:00:00 EST 1986

OSTI ID:6086684

Renschler, C L

Photoresist techniques and compositions are provided employing curcumin as an absorptive dye for the purpose of reducing linewidth non-uniformity caused by scattered and reflective light from the substrate-resist interface. The photoresist compositions containing curcumin as the absorptive dye are used in the production of microelectronic circuitry by both single layer and multilayer photoresist techniques.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• DOE Contract Number: AC04-76DP00789
• Assignee: Dept. of Energy
• Application Number: ON: DE88000844
• OSTI ID: 6086684
• Resource Relation: Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
36 MATERIALS SCIENCE
CURCUMIN
ABSORPTION
LINE WIDTHS
CONTROL
MICROELECTRONICS
RESINS
SPIN-ON COATING
BLEACHING
ETCHING
LAYERS
LIGHT SCATTERING
PHOTOSENSITIVITY
REFLECTION
RESOLUTION
ULTRAVIOLET RADIATION
AROMATICS
DEPOSITION
DYES
ELECTROMAGNETIC RADIATION
ETHERS
HYDROXY COMPOUNDS
KETONES
ORGANIC COMPOUNDS
ORGANIC OXYGEN COMPOUNDS
ORGANIC POLYMERS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHENOLS
POLYMERS
POLYPHENOLS
RADIATIONS
SCATTERING
SENSITIVITY
SURFACE COATING
SURFACE FINISHING
420800* - Engineering- Electronic Circuits & Devices- (-1989)
360603 - Materials- Properties
360601 - Other Materials- Preparation & Manufacture