Short wavelength laser
Patent
·
OSTI ID:6062612
A short wavelength laser is provided that is driven by conventional-laser pulses. A multiplicity of panels, mounted on substrates, are supported in two separated and alternately staggered facing and parallel arrays disposed along an approximately linear path. When the panels are illuminated by the conventional-laser pulses, single pass EUV or soft x-ray laser pulses are produced.
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Dept. of Energy
- Application Number:
- ON: TI85005761
- OSTI ID:
- 6062612
- Country of Publication:
- United States
- Language:
- English
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