Thermodynamic analysis of the concentration profiles of epitaxial layers of nonideal solid solutions
Based on thermodynamic analysis employing the quasiregular approach a mathematical model of the process of equilibrium crystallization of nonideal three-component solid solutions of compounds of the type A/sup III/B/sup V/ from a restricted volume of a solution in a melt was constructed. This model enables calculation of the distribution of the components over the thickness of the epitaxial layer for low rates of cooling of the solution in a melt. The computer calculations of the concentration profiles of the epitaxial layers of Ga/sub 1-x/Al/sub x/ agreed well with the experimental data for thicknesses of the epitaxial layers up to 20 ..mu..m. For high rates of cooling the mass transfer in the volume of the solution in a melt must be taken into account.
- Research Organization:
- Odessa Polytechnic Institute (USSR)
- OSTI ID:
- 6050621
- Journal Information:
- Inorg. Mater. (Engl. Transl.); (United States), Vol. 23:10; Other Information: Translated from Izv. Akad. Nauk SSSR, Neorg. Mater.; 23, No. 10, 1602-1606 (Oct 1987)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ALUMINIUM ARSENIDES
THERMAL ANALYSIS
GALLIUM ARSENIDES
SEMICONDUCTOR MATERIALS
LIQUID PHASE EPITAXY
SOLID SOLUTIONS
CHEMICAL COMPOSITION
COMPUTERIZED SIMULATION
COOLING
CRYSTAL MODELS
CRYSTALLIZATION
EQUILIBRIUM
QUANTITY RATIO
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
DISPERSIONS
EPITAXY
GALLIUM COMPOUNDS
MATERIALS
MATHEMATICAL MODELS
MIXTURES
PHASE TRANSFORMATIONS
PNICTIDES
SIMULATION
SOLUTIONS
360602* - Other Materials- Structure & Phase Studies