Fabrication and characterization of hybrid Nb-YBCO dc SQUIDs

Conference · Fri Mar 01 00:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:6046944

Frack, E K; Drake, R E; Patt, R; Radparvar, M ^[1]

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1. Hypres, Inc., Elmsford, NY (United States)

This paper reports on the fabrication of hybrid low T{sub c}/high T{sub c} dc SQUIDs of two flavors. The first kind utilizes niobium tunnel junctions and a YBCO film strip as the most inductive portion of the SQUID loop. This configuration allows a direct measurement of the inductance of the YBCO microstrip from which the effective penetration depth can be calculated. The successful fabrication of these SQUIDs has required 1. superconducting Nb-to-YBCO contacts, 2. deposition and patterning of an SiO{sub 2} insulation layer over YBCO, and 3. selective patterning of niobium and SiO{sub 2} relative to YBCO. All these process steps are pertinent to the eventual use of YBCO thin films in electronic devices.

• OSTI ID: 6046944
• Report Number(s): CONF-900944-; CODEN: IEMGA
• Journal Information: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States), Vol. 27:2; Conference: 1990 applied superconductivity conference, Snowmass, CO (United States), 24-28 Sep 1990; ISSN 0018-9464
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
NIOBIUM
JUNCTION TRANSISTORS
SQUID DEVICES
FABRICATION
SUPERCONDUCTING FILMS
GRAIN BOUNDARIES
SUPERCONDUCTING JUNCTIONS
BARIUM OXIDES
CALCULATION METHODS
COPPER OXIDES
HYBRID RESONANCE
MAGNETIC INSULATION
PENETRATION DEPTH
SILICON OXIDES
SUPERCONDUCTIVITY
TUNNEL EFFECT
YTTRIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CRYSTAL STRUCTURE
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
FLUXMETERS
JUNCTIONS
MEASURING INSTRUMENTS
METALS
MICROSTRUCTURE
MICROWAVE EQUIPMENT
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RESONANCE
SEMICONDUCTOR DEVICES
SILICON COMPOUNDS
SUPERCONDUCTING DEVICES
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
YTTRIUM COMPOUNDS
665412* - Superconducting Devices- (1992-)
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies
665411 - Basic Superconductivity Studies- (1992-)