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Title: GaP decomposition source for producing a dimer phosphorus molecular beam free of gallium and tetramer phosphorus

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.573257· OSTI ID:5951310

The complications arising in the molecular beam epitaxial growth of phosphides are reduced through the use of a diatomic phosphorus beam. We have fabricated a simple low-cost source for producing such a beam, suitable for a research environment.

Research Organization:
Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106
OSTI ID:
5951310
Journal Information:
J. Vac. Sci. Technol., A; (United States), Vol. 3:2
Country of Publication:
United States
Language:
English