GaP decomposition source for producing a dimer phosphorus molecular beam free of gallium and tetramer phosphorus
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
The complications arising in the molecular beam epitaxial growth of phosphides are reduced through the use of a diatomic phosphorus beam. We have fabricated a simple low-cost source for producing such a beam, suitable for a research environment.
- Research Organization:
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106
- OSTI ID:
- 5951310
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Vol. 3:2
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
GALLIUM PHOSPHIDES
DECOMPOSITION
MOLECULAR BEAM EPITAXY
BEAM PRODUCTION
MOLECULAR BEAMS
FABRICATION
COST
PHOSPHORUS
BEAMS
CHEMICAL REACTIONS
ELEMENTS
EPITAXY
GALLIUM COMPOUNDS
NONMETALS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions
GENERAL PHYSICS
GALLIUM PHOSPHIDES
DECOMPOSITION
MOLECULAR BEAM EPITAXY
BEAM PRODUCTION
MOLECULAR BEAMS
FABRICATION
COST
PHOSPHORUS
BEAMS
CHEMICAL REACTIONS
ELEMENTS
EPITAXY
GALLIUM COMPOUNDS
NONMETALS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions