Precision stabilization system for MIS-structure rf capacitance

Journal Article · Sun Feb 01 00:00:00 EST 1987 · Instrum. Exp. Tech. (Engl. Transl.); (United States)

OSTI ID:5843137

Antonenko, V I; Zhdan, A G

A relatively simple resonant small-signal system is described for stabilization of the rf capacitance of MIS structures in the frequency range of 1-30 MHz that is based on a VM560 Q-meter. The relative sensitivity to capacitance variation ..delta..C/C is 2 x 10/sup -6/ at a level of C approx. 500 pF, the absolute sensitivity ..delta..C approx. 1 fF, and the response time is approx. 0.1 sec. The system is designed for relaxation spectroscopy of boundary states in MIS structures in the constant-capacitance mode by methods of unsteady capacitance and thermostimulated discharge of an MIS capacitor.

• Research Organization: Institute of Radio Engineering and Electronics, Moscow, USSR
• OSTI ID: 5843137
• Journal Information: Instrum. Exp. Tech. (Engl. Transl.); (United States), Vol. 29:4; Other Information: Translated from Prib. Tekh. Eksp.; 29: No. 4, 161-163(Jul-Aug 1986)
• Country of Publication: United States
• Language: English

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TEMPERATURE DEPENDENCE
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