Reproducible technique for fabrication of thin films of high transition temperature superconductors

Journal Article · Mon Nov 23 00:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98513· OSTI ID:5829086

Mankiewich, P M; Scofield, J H; Skocpol, W J; Howard, R E; Dayem, A H; Good, E

We report on a new process to make films of Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7/ using coevaporation of Y, Cu, and BaF/sub 2/ on SrTiO/sub 3/ substrates. The films have high transition temperatures (up to 91 K for a full resistive transition), high critical current densities (10/sup 6/ A/cm/sup 2/ at 81 K), and a reduced sensitivity to fabrication and environmental conditions. Because of the lower reactivity of the films, we have been able to pattern them in both the pre-annealed and post-annealed states using conventional positive photoresist technology.

• Research Organization: Room 4D-335, AT and T Bell Laboratories, Holmdel, New Jersey 07733
• OSTI ID: 5829086
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 51:21
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
CRITICAL CURRENT
TRANSITION TEMPERATURE
VACUUM COATING
COPPER OXIDES
MICROELECTRONICS
SUPERCONDUCTING FILMS
STRONTIUM OXIDES
VAPOR DEPOSITED COATINGS
FABRICATION
TITANIUM OXIDES
YTTRIUM OXIDES
ANNEALING
BARIUM FLUORIDES
COPPER
CURRENT DENSITY
EXPERIMENTAL DATA
INTEGRATED CIRCUITS
SENSITIVITY
SUPERCONDUCTIVITY
VACUUM EVAPORATION
YTTRIUM
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
CURRENTS
DATA
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
EVAPORATION
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
INFORMATION
METALS
MICROELECTRONIC CIRCUITS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity