Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography

Journal Article · Sat Jul 01 00:00:00 EDT 1989 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1140949· OSTI ID:5819234

Anashin, V V; Arbuzov, V S; Blinov, G A; Veshcherevich, V G; Vobly, P D; Gorniker, E I; Zinevich, N I; Zinin, E I; Zubkov, N I; Kiselev, V A; others, and

The paper deals with two projects of compact superconducting storage rings for industrial production of integrated circuits (IC) using x-ray lithography within the 8- to 20-A wavelengths range. The azimuthally symmetric superconducting storage ring Siberia-AS at an energy of 600 MeV is a superconducting analog of VEP-1, one of the earliest storage rings in the world intended for the purposes of high-energy physics. Unlike the conventional design, no iron yoke is used in the storage ring under consideration to form the magnetic field at the equilibrium orbit and to close the return magnetic flux---this is performed by some inner and outer superconducting windings. Such a scheme enables the size of the storage ring to be substantially reduced (a cylinder of 2 m in diameter and 2 m long), and as a result, its weight decreases, too (about 10 tons). The eight-magnet storage ring Siberia-SM is of four-order symmetry so that the periodicity element comprises two rectangular magnets and three lenses. Its basic component is a superconducting bending rectangular magnet at a 6-T magnetic field. Two variants of such magnets have been proposed: in the first, the iron yoke is utilized to form the magnetic field and to close the return flux, while the second is an ironless C-shaped magnet manufactured on the basis of original wedgelike coils.

• Research Organization: Institute of Nuclear Physics, 630090 Novosibirsk, USSR (SU)
• OSTI ID: 5819234
• Journal Information: Rev. Sci. Instrum.; (United States), Vol. 60:7
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
SYNCHROTRON RADIATION SOURCES
DESIGN
INDUSTRY
INTEGRATED CIRCUITS
STORAGE RINGS
SUPERCONDUCTING MAGNETS
SYMMETRY
USSR
ASIA
EASTERN EUROPE
ELECTRICAL EQUIPMENT
ELECTROMAGNETS
ELECTRONIC CIRCUITS
EQUIPMENT
EUROPE
MAGNETS
MICROELECTRONIC CIRCUITS
RADIATION SOURCES
SUPERCONDUCTING DEVICES
430400* - Particle Accelerators- Storage Rings