Reactions of tungsten-titanium alloys with decomposition products from a glow UHF discharge in a tetrafluoromethane-oxygen mixture

Journal Article · Fri Jul 01 00:00:00 EDT 1988 · High Energy Chem. (Engl. Transl.); (United States)

OSTI ID:5760621

Amirov, I I; Vinogradov, G K; Slovetskii, D I

Decomposition products from tetrafluoromethane mixed with oxygen react with WTi alloy in an HF glow discharge, the extent of reaction being dependent on the atomic fluorine concentration, temperature, and surface potential. The rates of reaction with the CF/sub 4/ products are proportional to the atomic fluorine concentrations. The effective activation energies have been determined for the atomic fluorine reacting with the alloy components in various gases. The metal removal rate increases when the specimen is negative with respect to the plasma potential, which is ascribed to the surface being bombarded by positive ions or to the electric field affecting the surface reaction rates.

• OSTI ID: 5760621
• Journal Information: High Energy Chem. (Engl. Transl.); (United States), Vol. 22:1; Other Information: Translated from Khim. Vys. Energ.; 22: No. 1, 73-77(Jan-Feb 1988)
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
CARBON TETRAFLUORIDE
DECOMPOSITION
TITANIUM ALLOYS
GLOW DISCHARGES
TUNGSTEN ALLOYS
ACTIVATION ENERGY
ARGON
CHEMICAL REACTION KINETICS
EROSION
ETCHING
FLUORINE
IONIZATION
OXYGEN
SPUTTERING
TITANIUM FLUORIDES
TUNGSTEN FLUORIDES
VOLATILITY
ALLOYS
CHEMICAL REACTIONS
ELECTRIC DISCHARGES
ELEMENTS
ENERGY
FLUIDS
FLUORIDES
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINE COMPOUNDS
GASES
HALIDES
HALOGEN COMPOUNDS
HALOGENATED ALIPHATIC HYDROCARBONS
HALOGENS
KINETICS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
RARE GASES
REACTION KINETICS
REFRACTORY METAL COMPOUNDS
SURFACE FINISHING
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TUNGSTEN COMPOUNDS
400800* - Combustion
Pyrolysis
& High-Temperature Chemistry
360102 - Metals & Alloys- Structure & Phase Studies