Fluoride interference in the determination of boron by inductively coupled plasma emission spectroscopy
- Balazs Analytical Laboratory, Sunnyvale, CA (United States)
Boron determination in borophosphosilicate glass films by the ICP-AES or ICP-MS technique can be performed after dissolution of the sample in HF solution. However, addition of HF to boric acid standard solution can cause a drift in the slope of the calibration curve. The signal change was correlated with the kinetics of the borontetrafluoride complex formation reaction. The mechanism was explained by the selectively increased boron transport into the plasma, which was caused by the more efficient diffusion of borontrifluoride gas through the aerosol particles into the nebulizer gas. With the kinetics of borontetrafluoride complex formation taken into consideration, an accurate and precise method was developed for the determination of boron in BPSG films. 16 refs., 3 figs., 5 tabs.
- OSTI ID:
- 5717776
- Journal Information:
- Applied Spectroscopy; (United States), Vol. 47:2; ISSN 0003-7028
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
BORON
QUANTITATIVE CHEMICAL ANALYSIS
BORON FLUORIDES
BOROPHOSPHATE GLASS
BOROSILICATE GLASS
CHEMICAL REACTION KINETICS
EMISSION SPECTROSCOPY
FILMS
INTERFERING ELEMENTS
PLASMA HEATING
BORON COMPOUNDS
CHEMICAL ANALYSIS
ELEMENTS
FLUORIDES
FLUORINE COMPOUNDS
GLASS
HALIDES
HALOGEN COMPOUNDS
HEATING
KINETICS
REACTION KINETICS
SEMIMETALS
SPECTROSCOPY
400102* - Chemical & Spectral Procedures