Composition and microstructure of chemically vapor-deposited boron nitride, aluminum nitride, and boron nitride + aluminum nitride composites
- Georgia Technology Research Inst., School of Materials Engineering, and School of Chemical Engineering, Georgia Inst. of Technology, Atlanta, GA (US)
The composition and microstructure of dispersed-phase ceramic composites containing BN and AlN as well as BN and AlN single-phase ceramics prepared by chemical vapor deposition have been characterized using X-ray diffraction, scanning electron microscopy, electron microprobe, and transmission electron microscopy techniques. Under certain processing conditions, the codeposited coating microstructure consists of small single-crystal AlN fibers (whiskers) surrounded by a turbostratic BN matrix. Other processing conditions resulted in single-phase films of AlN with a fibrous structure. The compositions of the codeposits range from 2 to 50 mol% BN, 50 to 80 mol% AlN with 7% to 25% oxygen impurity as determined by electron microprobe analysis.
- OSTI ID:
- 5663471
- Journal Information:
- Journal of the American Ceramic Society; (USA), Vol. 74:2; ISSN 0002-7820
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ALUMINIUM NITRIDES
CHEMICAL VAPOR DEPOSITION
COMPOSITE MATERIALS
MICROSTRUCTURE
BORON NITRIDES
COATINGS
ELECTRON MICROPROBE ANALYSIS
FILMS
SCANNING ELECTRON MICROSCOPY
WHISKERS
X-RAY DIFFRACTION
ALUMINIUM COMPOUNDS
BORON COMPOUNDS
CHEMICAL ANALYSIS
CHEMICAL COATING
COHERENT SCATTERING
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIFFRACTION
ELECTRON MICROSCOPY
MATERIALS
MICROANALYSIS
MICROSCOPY
MONOCRYSTALS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
SCATTERING
SURFACE COATING
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies