High deposition rate preparation of amorphous silicon solar cells by rf glow discharge decomposition of disilane
The optical and electrical properties of hydrogenated amorphous silicon films produced by rf glow discharge decomposition of disilane diluted in helium (Si/sub 2/H/sub 6//He = 1/9) have been studied while systematically varying the film deposition rate. The properties and composition of the films were monitored by measuring the optical band gap, IR vibrational spectrum, dark conductivity, and the photoconductivity as a function of the deposition rate. The photoluminescence of the high deposition rate films gave a peak at 1.33 eV. These films, whose properties are rather similar to those of the conventional a-Si:H films prepared from monosilane, have been used to fabricate nip-type a-Si:H solar cells. At a deposition rate of 11 A/sec, a conversion efficiency of 6.86% was obtained. This high efficiency shows that disilane is applicable for mass production fabrication of a-Si:H solar cells.
- Research Organization:
- Tokyo Institute of Technology, 2-12-1, Ohokayama, Meguro-ku, Tokyo 152, Japan
- OSTI ID:
- 5645540
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 55:2
- Country of Publication:
- United States
- Language:
- English
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Hydrogenated amorphous silicon films prepared by glow discharge of disilane
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Related Subjects
36 MATERIALS SCIENCE
SILICON
CHEMICAL COMPOSITION
ELECTRICAL PROPERTIES
OPTICAL PROPERTIES
SURFACE COATING
SILICON SOLAR CELLS
EFFICIENCY
FABRICATION
AMORPHOUS STATE
BORON IONS
CRYSTAL DOPING
DECOMPOSITION
DEPOSITION
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ENERGY GAP
FILMS
GLOW DISCHARGES
HYDROGENATION
PHOSPHORUS IONS
PHOTOLUMINESCENCE
SILANES
SILICON CARBIDES
CARBIDES
CARBON COMPOUNDS
CHARGED PARTICLES
CHEMICAL REACTIONS
DIRECT ENERGY CONVERTERS
ELECTRIC DISCHARGES
ELEMENTS
EQUIPMENT
HYDRIDES
HYDROGEN COMPOUNDS
IONS
LUMINESCENCE
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion
360603 - Materials- Properties