Development of a polysilicon process based on chemical vapor deposition (Phase 1 and Phase 2). Final report, 6 October 1979-25 June 1982
The goal of this program was to demonstrate that a dichlorosilane based reductive chemical vapor deposition (CVD) process is capable of producing a high-purity, low-cost polycrystalline silicon. Physical form and purity of this material was to be consistent with FSA material requirements for manufacturing high efficiency solar cells. The feasibility phase (Phase 1) provided information through laboratory experiments relating to the kinetics of trichlorosilane redistribution, catalyst behavior, and decomposition characteristics of dichlorosilane. Of particular importance, Dowex MWA-1 was shown to be an effective redistribution catalyst at moderate temperatures and very few reactor related operational problems were observed during dichlorosilane decomposition. The demonstration phase (Phase 2) evaluated technology developed during Phase 1 at a dichlorosilane production and decomposition scale sufficient to allow scale-up for the Experimental Process System Development Unit (EPSDU). Catalyst life, polysilicon deposition rate, and product purity were established as acceptable in addition to defining process limitations. An economic analysis was completed for a 1000 metric ton per year commercial facility using Hemlock Semiconductor's Polysilicon Process Based On Chemical Vapor Deposition. This analysis indicated that polycrystalline silicon of semiconductor quality could be produced at a price of $20.27 per kilogram.
- Research Organization:
- Hemlock Semiconductor Corp., MI (USA)
- DOE Contract Number:
- NAS-7-100-955533
- OSTI ID:
- 5584216
- Report Number(s):
- DOE/JPL/955533-83/7; ON: DE84004975
- Resource Relation:
- Other Information: Portions are illegible in microfiche products. Original copy available until stock is exhausted
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
SILICON
CHEMICAL VAPOR DEPOSITION
CATALYSTS
ECONOMIC ANALYSIS
FEASIBILITY STUDIES
KINETICS
PERFORMANCE
PROCESS DEVELOPMENT UNITS
SAFETY
SILANES
SILICON SOLAR CELLS
CHEMICAL COATING
DEPOSITION
DIRECT ENERGY CONVERTERS
ECONOMICS
ELEMENTS
EQUIPMENT
FUNCTIONAL MODELS
HYDRIDES
HYDROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture