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Title: Plasma deposition of amorphous metal alloys

Patent ·
OSTI ID:5535676

Amorphous metal alloy coatings are plasma-deposited by dissociation of vapors of organometallic compounds and metalloid hydrides in the presence of a reducing gas, using a glow discharge. Tetracarbonylnickel, phosphine, and hydrogen constitute a typical reaction mixture of the invention, yielding a NiPC alloy.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
DOE Contract Number:
AC04-76DP00789
Assignee:
Dept. of Energy
Application Number:
ON: DE86013686
OSTI ID:
5535676
Country of Publication:
United States
Language:
English