Chemical vapor deposition of amorphous semiconductor films. Semiannual report, 1 May 1984-31 October 1984
This report describes the results of research done by the Institute of Energy Conversion for the Solar Energy Research Institute in 1984 on high-efficiency, stable, amorphous silicon solar cells, fabricated by chemical vapor deposition (CVD) from disilane at high growth rates. The kinetics of CVD with higher order silanes were modelled for a tubular reactor with static substrates. A gas-phase reaction network was adopted, based on published silylene insertion and decomposition pathways. Mass balances for hydrogen and all saturated silanes through octasilane were derived. Boron-doped a-Si:H p-layers were deposited by CVD at 200/sup 0/ to 250/sup 0/C. Band gap and conductivity depended strongly on the diborane fraction in the feed gas, independent of substrate temperature. The effects of intrinsic layer deposition temperature and growth rate on material properties and device performance were studied. Cell parameters of p-i-n cells were correlated with i-layer deposition temperature and growth rate. Fill factor and short-circuit current depended on deposition conditions, while open-circuit voltage did not. Effects of diborane additions to the feed gas during i-layer deposition were studied. Experimental evidence and calculations indicate high resistance at the back contact.
- Research Organization:
- Delaware Univ., Newark (USA). Inst. of Energy Conversion
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 5513196
- Report Number(s):
- SERI/STR-211-2711; ON: DE85012148
- Resource Relation:
- Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SILICON
CHEMICAL VAPOR DEPOSITION
SILICON SOLAR CELLS
FABRICATION
AMORPHOUS STATE
BORON
EFFICIENCY
ELECTRIC CONDUCTIVITY
EXPERIMENTAL DATA
FILL FACTORS
MATHEMATICAL MODELS
PERFORMANCE
SILANES
SUBSTRATES
THICKNESS
THIN FILMS
CHEMICAL COATING
DATA
DEPOSITION
DIMENSIONS
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
140501* - Solar Energy Conversion- Photovoltaic Conversion