As-grown Y-Ba-Cu-O thin films by reactive coevaporation with oxygen plasma cooling

Journal Article · Sun Oct 15 00:00:00 EDT 1989 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.344033· OSTI ID:5491403

Matsumoto, M; Akoh, H; Takada, S ^[1]

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1. Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305, Japan (JP)

We have developed a new fabrication process of as-grown Y-Ba-Cu-O thin films using a reactive coevaporation method specially with the rf-plasma cooling in the low oxygen pressure of 0.4 mTorr. By this O{sub 2} plasma cooling process, the transition temperature {ital T}{sub {ital c}} is improved from 40 to 81 K for the film with a thickness of 1000 A. The x-ray diffraction analysis shows that the activated oxygen species generated by the rf plasma make Y-Ba-Cu-O films oxidize sufficiently even in the low pressure of oxygen. In addition, we have studied the thickness dependence of {ital T}{sub {ital c}} for as-grown films with various thicknesses of 60--2000 A.

• OSTI ID: 5491403
• Journal Information: Journal of Applied Physics; (USA), Vol. 66:8; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
CHEMICAL VAPOR DEPOSITION
TRANSITION TEMPERATURE
COPPER OXIDES
YTTRIUM OXIDES
COOLING
FABRICATION
OXYGEN
PLASMA
SUPERCONDUCTING FILMS
THICKNESS
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
DEPOSITION
DIFFRACTION
DIMENSIONS
ELEMENTS
FILMS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity