Synthesis of sheet conductive layers on the surface of some insulator ceramics (TiO sub 2 , ZrO sub 2 , HfO sub 2 ) by multipulse CO sub 2 -laser irradiation in an ammonia atmosphere

Journal Article · Sun Oct 15 00:00:00 EDT 1989 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.344080· OSTI ID:5421049

Ursu, I; Mihailescu, I N; Nistor, L C; Teodorescu, V S ^[1]; Prokhorov, A M; Konov, V I; Nikitin, P I; Uglov, S A ^[2]

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1. Central Institute of Physics, Bucharest, Romania (RO)
2. Institute of General Physics, Moscow, USSR

It is shown that by multipulse TEA-CO{sub 2} laser irradiation of some insulator ceramic samples (TiO{sub 2}, ZrO{sub 2}, HfO{sub 2}) in an ammonia atmosphere, surface layers are synthesized exhibiting a complicated morphology and having a complex structure containing, beside metallic nitrides, nonstoichiometric oxygen-depleted oxides, oxinitrides, etc. Such layers have a diminished sheet resistance, and display good conduction characteristics.

• OSTI ID: 5421049
• Journal Information: Journal of Applied Physics; (USA), Vol. 66:8; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
HAFNIUM OXIDES
ELECTRIC CONDUCTIVITY
TITANIUM OXIDES
ZIRCONIUM OXIDES
AMMONIA
ELECTRON MICROSCOPY
IRRADIATION
LASER RADIATION
LAYERS
MASS SPECTROSCOPY
MORPHOLOGY
NITRIDES
OPTICAL MICROSCOPY
PULSES
SURFACE PROPERTIES
X-RAY DIFFRACTION
CHALCOGENIDES
COHERENT SCATTERING
DIFFRACTION
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
HAFNIUM COMPOUNDS
HYDRIDES
HYDROGEN COMPOUNDS
MICROSCOPY
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
RADIATIONS
REFRACTORY METAL COMPOUNDS
SCATTERING
SPECTROSCOPY
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties