Vacuum mechatronics first international workshop

Conference · Sun Jan 01 00:00:00 EST 1989

OSTI ID:5359804

Belinski, S E; Shirazi, M; Hackwood, S; Beni, G ^[1]

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1. eds.; California Univ., Santa Barbara, CA (USA)

This report contains papers on the following topics: proposed epitaxial thin film growth in the ultra-vacuum of space; particle monitoring and control in vacuum processing equipment; electrostatic dust collector for use in vacuum systems; materials evaluation of an electrically noisy vacuum slip ring assembly; an overview of lubrication and associated materials for vacuum service; the usage of lubricants in a vacuum environment; guidelines and practical applications for lubrication in vacuum; recent development in leak detector and calibrator designs; the durability of ballscrews for ultrahigh vacuum; vacuum-compatible robot for self-contained manufacturing systems; the design, fabrication, and assembly of an advanced vacuum robotics system for space payload calibration; design criteria for mechanisms used in space; and concepts and requirements for semiconductor multiprocess integration in vacuum. These papers are indexed separately elsewhere.

• Research Organization: American Inst. of Physics, New York, NY (USA)
• Sponsoring Organization: AIP; AMVACS; CADCOMM; National Science Foundation (NSF)
• OSTI ID: 5359804
• Report Number(s): CONF-8902123-; ISBN: 0-88318-394-3
• Resource Relation: Conference: 1. international vacuum mechatronics workshop, Santa Barbara, CA (USA), 2-3 Feb 1989; Related Information: American Vacuum Society Series 7; Conference Proceedings No. 192
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
VACUUM SYSTEMS
USES
CALIBRATION
CRYSTAL GROWTH
DESIGN
DUST COLLECTORS
ELECTROSTATIC PRECIPITATORS
LEADING ABSTRACT
LEAK DETECTORS
LOW PRESSURE
LUBRICANTS
MONITORING
ROBOTS
SEMICONDUCTOR DEVICES
THIN FILMS
ABSTRACTS
DOCUMENT TYPES
EQUIPMENT
FILMS
POLLUTION CONTROL EQUIPMENT
420200* - Engineering- Facilities
Equipment
& Techniques