SXLS Phase 2 vacuum system
Abstract
Phase 1 of the SXLS (Superconducting X-Ray Lithography Source) is described. It is a room temperature, racetrack-shaped electron storage ring, 8.5 meters in circumference. The Phase 2 design consists of replacing the two room temperature 180{degree} dipole magnets of Phase 1 with superconducting magnets. However, even though superconducting magnets are used, the vacuum chambers within them will operate at room temperature. The chambers are constructed as weldments and are made of INCONEL-625. They are bakeable to 150{degrees}C in-situ and incorporate nine photon beam ports. Each have built-in distributed sputter-ion pumps (DIP), non-evaporable getter (NEG) pumps, beam position monitors, and ion clearing electrodes. R D is underway to optimize the DIP, which much operate at 3.86 Tesla, and to develop a low photo yield coating or treatment for the internal surfaces of the chambers.
- Authors:
- Publication Date:
- Research Org.:
- Brookhaven National Lab., Upton, NY (United States)
- Sponsoring Org.:
- USDOE; USDOE, Washington, DC (United States)
- OSTI Identifier:
- 5335137
- Report Number(s):
- BNL-46469; CONF-910505-393
ON: DE91016993
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Conference
- Resource Relation:
- Conference: 1991 Institute of Electrical and Electronics Engineers (IEEE) particle accelerator conference (PAC), San Francisco, CA (United States), 6-9 May 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 43 PARTICLE ACCELERATORS; VACUUM SYSTEMS; DESIGN; BEAM BENDING MAGNETS; ELECTRON RINGS; GETTERS; INCONEL 625; SPUTTER-ION PUMPS; STORAGE RINGS; SUPERCONDUCTING MAGNETS; X-RAY SOURCES; ALLOY-NI61CR22MO9NB4FE3; ALLOYS; ALUMINIUM ADDITIONS; ALUMINIUM ALLOYS; CHROMIUM ALLOYS; CORROSION RESISTANT ALLOYS; ELECTRICAL EQUIPMENT; ELECTROMAGNETS; EQUIPMENT; HEAT RESISTANT MATERIALS; HEAT RESISTING ALLOYS; INCONEL ALLOYS; IRON ALLOYS; LABORATORY EQUIPMENT; MAGNETS; MATERIALS; MOLYBDENUM ALLOYS; NICKEL ALLOYS; NICKEL BASE ALLOYS; NIOBIUM AL; PUMPS; RADIATION SOURCES; SUPERCONDUCTING DEVICES; VACUUM PUMPS; X-RAY EQUIPMENT; 430303* - Particle Accelerators- Experimental Facilities & Equipment; 430400 - Particle Accelerators- Storage Rings
Citation Formats
Schuchman, J C, Chou, T S, Halama, H, Hsieh, H, Kim, T, Pjerov, S, and Staicu, F. SXLS Phase 2 vacuum system. United States: N. p., 1991.
Web.
Schuchman, J C, Chou, T S, Halama, H, Hsieh, H, Kim, T, Pjerov, S, & Staicu, F. SXLS Phase 2 vacuum system. United States.
Schuchman, J C, Chou, T S, Halama, H, Hsieh, H, Kim, T, Pjerov, S, and Staicu, F. 1991.
"SXLS Phase 2 vacuum system". United States.
@article{osti_5335137,
title = {SXLS Phase 2 vacuum system},
author = {Schuchman, J C and Chou, T S and Halama, H and Hsieh, H and Kim, T and Pjerov, S and Staicu, F},
abstractNote = {Phase 1 of the SXLS (Superconducting X-Ray Lithography Source) is described. It is a room temperature, racetrack-shaped electron storage ring, 8.5 meters in circumference. The Phase 2 design consists of replacing the two room temperature 180{degree} dipole magnets of Phase 1 with superconducting magnets. However, even though superconducting magnets are used, the vacuum chambers within them will operate at room temperature. The chambers are constructed as weldments and are made of INCONEL-625. They are bakeable to 150{degrees}C in-situ and incorporate nine photon beam ports. Each have built-in distributed sputter-ion pumps (DIP), non-evaporable getter (NEG) pumps, beam position monitors, and ion clearing electrodes. R D is underway to optimize the DIP, which much operate at 3.86 Tesla, and to develop a low photo yield coating or treatment for the internal surfaces of the chambers.},
doi = {},
url = {https://www.osti.gov/biblio/5335137},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 1991},
month = {Tue Jan 01 00:00:00 EST 1991}
}