Aerosol chemical vapor deposition of metal oxide films

Patent · Tue Jan 11 00:00:00 EST 1994

OSTI ID:5226424

Ott, K C; Kodas, T T

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said substrate.

• DOE Contract Number: W-7405-ENG-36
• Assignee: PTO; EDB-94-064381
• Patent Number(s): US 5278138; A
• Application Number: PPN: US 7-774748
• OSTI ID: 5226424
• Resource Relation: Patent File Date: 11 Oct 1991
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
GALLIUM OXIDES
VAPOR DEPOSITED COATINGS
LANTHANUM OXIDES
MAGNESIUM OXIDES
OXIDES
CHEMICAL VAPOR DEPOSITION
SAPPHIRE
SILICON
ZIRCONIUM OXIDES
COMPOSITE MATERIALS
FABRICATION
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COATINGS
CORUNDUM
DEPOSITION
ELEMENTS
GALLIUM COMPOUNDS
LANTHANUM COMPOUNDS
MAGNESIUM COMPOUNDS
MATERIALS
MINERALS
OXIDE MINERALS
OXYGEN COMPOUNDS
RARE EARTH COMPOUNDS
SEMIMETALS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
360601* - Other Materials- Preparation & Manufacture