Numerical calculation of ion charge state distributions of ECR-discharges in the mixture (Ar-N)
- Univ. Simon Bolivar, Caracas (Venezuela). Dept. de Fisica
- Univ. Metropolitana, Caracas (Venezuela). Dept. de Fisica
In this paper the authors present a simple balance model to calculate mixture Ar-N assuming total dissociation of the nitrogen molecules. In the model the authors consider direct and single step ionization and single and double charge transfer reactions between argon and nitrogen. Plasma confinement will be described by a unique parameter {Lambda}{sub N} = n{sub e}{tau}{sub N} for all nitrogen ions and similar {Lambda}{sub Ar} = n{sub e}{tau}{sub Ar} for argon ions and {Lambda}{sub e} = n{sub e}{tau}{sub e}. The electron distribution functions are assumed either as a power law f(E) {proportional_to}E{sup {minus}s} for the case of a non-maxwellian plasma and a law f(E) {proportional_to} exp({minus}E/T{sub e}) for the opposite. In stationary state a nonlinear set of coupled equations in the so called reduced charge densities N{sub k} ({double_bond} n{sub k}/n{sub e}) can be found and solved using standard mathematical procedures. Solutions for different situations as: charge state distribution against s (spectral index), electron temperature T{sub e}, etc. will be given and discussed. These results will be compared with experimental data of different authors.
- OSTI ID:
- 51802
- Report Number(s):
- CONF-940604-; ISBN 0-7803-2006-9; TRN: 95:012051
- Resource Relation:
- Conference: 1994 Institute of Electrical and Electronic Engineers (IEEE) international conference on plasma science, Santa Fe, NM (United States), 6-8 Jun 1994; Other Information: PBD: 1994; Related Information: Is Part Of IEEE conference record -- Abstracts; PB: 252 p.
- Country of Publication:
- United States
- Language:
- English
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