Method of making segmented pyrolytic graphite sputtering targets
Patent
·
OSTI ID:5173597
Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface. 2 figures.
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Univ. of California, Oakland, CA ()
- Patent Number(s):
- US 5284539; A
- Application Number:
- PPN: US 8-042668
- OSTI ID:
- 5173597
- Resource Relation:
- Patent File Date: 5 Apr 1993
- Country of Publication:
- United States
- Language:
- English
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