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Title: Makeup air systems energy-saving opportunities

Conference · · ASHRAE Transactions (American Society of Heating, Refrigerating and Air-Conditioning Engineers); (United States)
OSTI ID:5162715
 [1]
  1. Anderson DeBartolo Pan, Inc., Tucson, AZ (US)

Makeup air semiconductor clean spaces can vary from 1 cfm/ft{sup 2} (5.08 L/s {center dot} m{sup 2}) to 10 cfm/ft{sup 2} (50.81 L/s {center dot} m{sup 2}) and typically averages 5 cfm/ft{sup 2} (25.4 L/s {center dot} m {sup 2}). Accordingly, the energy requirements to cool, dehumidify, preheat, and/or humidify are significant and can represent 30% to 65% of the total thermal energy required to maintain a cleanroom environment. Because of high energy requirements, cost-effective means to reduce energy costs can influence unit production costs. The greatest opportunity for significant energy savings can be achieved by reducing or displacing mechanical cooling or fuel-generated heating requirements. The primary focus of this paper is to present and discuss various concepts of heat recovery, dual-temperature cooling, direct and indirect evaporative cooling, and heat rejection directed toward makeup air systems that can achieve these objectives. In addition, equipment-sizing considerations not necessarily applicable to systems that are less energy intensive or that operate continuously are explored.

OSTI ID:
5162715
Report Number(s):
CONF-9006117-; CODEN: ASHTA
Journal Information:
ASHRAE Transactions (American Society of Heating, Refrigerating and Air-Conditioning Engineers); (United States), Vol. 96:2; Conference: Annual meeting of the American Society of Heating, Refrigerating and Air-Conditioning Engineers (ASHRAE), St. Louis, MO (United States), 9-13 Jun 1990; ISSN 0001-2505
Country of Publication:
United States
Language:
English