Effect of a magnetic filter on the formation and deposition of high-Z impurities in a multicusp ion source

Journal Article · Wed Sep 15 00:00:00 EDT 1982 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.93573· OSTI ID:5079973

Ehlers, K W; Leung, K N; Pincosy, P A; Vella, M C

The presence of a magnetic filter in a multicusp ion source reduces the transport of tungsten to the extractor region by forming a uniform plasma potential region in the source chamber. Because of the reduced numbers of primary electrons in the extraction chamber, the plasma grid floats near the plasma potential and this reduces the amount of impurity ions formed from sputtered grid material.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 5079973
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 41:6
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ION SOURCES
MAGNETIC FILTERS
PERFORMANCE
ATOMIC NUMBER
CUSPED GEOMETRIES
DEPOSITION
ELECTRONS
GRIDS
IMPURITIES
PLASMA
POTENTIALS
SPUTTERING
SYNTHESIS
TUNGSTEN
ELECTRODES
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FILTERS
LEPTONS
MAGNETIC FIELD CONFIGURATIONS
METALS
OPEN CONFIGURATIONS
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions