CARS (coherent anti-Stokes Raman spectroscopy) detection of gaseous species for diamond deposition process

Conference · Sun Jan 01 00:00:00 EST 1989 · Preprints of Papers, American Chemical Society, Division of Fuel Chemistry; (USA)

OSTI ID:5043696

Roman, W C; Eckbreth, A C ^[1]

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1. Propulsion Science Lab., Hartford, CT (USA)

In order to understand the complicated chemical and physical processes that occur during the deposition of hard face coatings such as diamond, diagnostics that are remote, nonintrusive and sensitive to potential chemical species are necessary. One particularly promising approach is coherent anti-Stokes Raman spectroscopy (CARS) useful for measurements of temperature and species concentrations. Results to be described will include CARS measurements on a PACVD reactor used for depositing high quality diamond films. A mixture of acetylene (C{sub 2}H{sub 2}) and Argon, tested over a range of total pressures down to 0.1 Torr, was used to calibrate the CARS system. With the existing CARS system, detectivity of C{sub 2}H{sub 2} to 5 mtorr was demonstrated. This paper describes details of the scanned narrowband colinear CARS system and examples of CARS spectra obtained for CH{sub 4} and C{sub 2}H{sub 2} species under rf PACVD diamond deposition conditions and also using an alternate filament assisted technique.

• OSTI ID: 5043696
• Report Number(s): CONF-8904168-; CODEN: ACFPA
• Journal Information: Preprints of Papers, American Chemical Society, Division of Fuel Chemistry; (USA), Vol. 34:2; Conference: Symposium on diamonds derived from fuels: diagnostics for diamond CVD, Dallas, TX (USA), 9-14 Apr 1989; ISSN 0569-3772
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
DIAMONDS
DEPOSITION
EXPERIMENTAL DATA
FILAMENTS
GASES
MEASURING METHODS
PLASMA
RAMAN SPECTRA
RAMAN SPECTROSCOPY
THIN FILMS
CARBON
DATA
ELEMENTAL MINERALS
ELEMENTS
FILMS
FLUIDS
INFORMATION
LASER SPECTROSCOPY
MINERALS
NONMETALS
NUMERICAL DATA
SPECTRA
SPECTROSCOPY
400201* - Chemical & Physicochemical Properties
360601 - Other Materials- Preparation & Manufacture