Crystallization of amorphous titanium oxide thin films by pulsed UV-laser irradiation
- Matsushita Electric Industrial Co., Ltd., Kyoto (Japan). Central Research Labs.
Oxide ceramic materials are applied to many electric devices using dielectric, ferroelectric, piezoelectric and elastic properties. Effects of ultraviolet (UV) laser irradiation on the local crystal structure have been investigated for amorphous Ti-O thin films sputtered on ST-cut quartz substrates. The irradiation was conducted with a pulsed KrF excimer laser of 248 nm in wavelength. There were few changes in the optical transmission spectra of the films before and after the irradiation. The crystal structure of the films was characterized by electron diffraction, XPS and EXAFS analyses. The results obtained from these analyses suggest the films gradually crystallize to a TiO{sub 2} crystal with the rutile type structure by the increasing of the laser pulses.
- OSTI ID:
- 490874
- Report Number(s):
- CONF-951155-; ISBN 1-55899-300-2; TRN: IM9729%%125
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: 1996; Related Information: Is Part Of Advanced laser processing of materials -- Fundamentals and applications; Singh, R. [ed.] [Univ. of Florida, Gainesville, FL (United States)]; Norton, D. [ed.] [Oak Ridge National Lab., TN (United States)]; Laude, L. [ed.] [Univ. of Mons-Hainaut, Mons (Belgium)]; Narayan, J. [ed.] [North Carolina State Univ., Raleigh, NC (United States)]; Cheung, J. [ed.] [Rockwell International Science Center, Thousand Oaks, CA (United States)]; PB: 693 p.; Materials Research Society symposium proceedings, Volume 397
- Country of Publication:
- United States
- Language:
- English
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