Pulsed laser deposition of ZnO: Energetic Rydberg state atoms and their impact on film growth
- Univ. of New Hampshire, Durham, NH (United States). Physics Dept.
Zinc oxide films were grown on both <100>-MgO and amorphous SiO{sub 2} substrates using either a Zn or a ZnO target in a background ambient of oxygen. Using a time-of-flight quadrupole mass spectrometer (TOFQMS), the kinetic energies ({approximately}1--2,000 eV) and the charge state of atoms and small molecules in the ablation plumes from both targets were examined. A unique capability of this TOFQMS is the ability to examine the dynamics of the ion-electron recombination process, and this feature was used to try to quantify long-lived excited state particles within the ablation plume. It was found that the relative amount of neutral species formed by ion recombination was larger in the case of the Zn target compared to the ZnO. A detailed comparison of the ZnO film microstructure prepared with both targets at two deposition pressures (0.01 and 0.1 torr) and a variety of substrate temperatures from 50--500 C was performed. The crystallographic and morphological results suggest that the condensation of highly electronically excited state particles, both ions and long-lived excited state neutrals likely affects film growth, and can enhance desirable surface processes, such as athermal recrystallization and surface mobility, that favor oriented crystal growth at lower substrate temperatures.
- OSTI ID:
- 490833
- Report Number(s):
- CONF-951155-; ISBN 1-55899-300-2; TRN: IM9729%%84
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: 1996; Related Information: Is Part Of Advanced laser processing of materials -- Fundamentals and applications; Singh, R. [ed.] [Univ. of Florida, Gainesville, FL (United States)]; Norton, D. [ed.] [Oak Ridge National Lab., TN (United States)]; Laude, L. [ed.] [Univ. of Mons-Hainaut, Mons (Belgium)]; Narayan, J. [ed.] [North Carolina State Univ., Raleigh, NC (United States)]; Cheung, J. [ed.] [Rockwell International Science Center, Thousand Oaks, CA (United States)]; PB: 693 p.; Materials Research Society symposium proceedings, Volume 397
- Country of Publication:
- United States
- Language:
- English
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