MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE
A vacuum pump is designed which operates by ionizing incoming air and by withdrawing the ions from the system by means of electrical fields. The apparatus comprises a cylindrical housing communicable with the vessel to be evacuated and having a thin wall section in one end. Suitable coils provide a longitudinal magnetic field within the cylinder. A broad cathode and an anode structure is provided to establish a plurality of adjacent electron beams which are parallel to the cylinder axis. Electron reflector means are provided so that each of the beams constitutes a PIG or reflex discharge. Such structure provides a large region in which incoming gas molecules may be ionized by electron bombardment. A charged electrode assembly accelerates the ions through the thin window, thereby removing the gas from the system. The invention may also be utilized as a highly efficient ion source. (AEC)
- Research Organization:
- Originating Research Org. not identified
- NSA Number:
- NSA-16-008858
- Assignee:
- U.S. Atomic Energy Commission
- Patent Number(s):
- US 3022933
- OSTI ID:
- 4816261
- Resource Relation:
- Other Information: Orig. Receipt Date: 31-DEC-62
- Country of Publication:
- United States
- Language:
- English
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