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Title: Fabrication issues of oxide-confined VCSELs

Fabrication issues of oxide-confined VCSELs To insert high-performance oxide-confined vertical-cavity surface- emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, sample temperature, carrier gas flow, and bubbler water temperature. Knowledge of these parameters has enable the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for Al{sub x}Ga{sub 1-x}As layers of x=1.00, 0.98, and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively. 7 figs, 1 tab, 14 refs.
Authors: ; ; ;
Publication Date:
OSTI Identifier:OSTI ID: 468451
Report Number(s):SAND--97-0909C; CONF-970231--28
ON: DE97004649
DOE Contract Number:AC04-94AL85000
Resource Type:Conference
Resource Relation:Conference: SPIE international symposium, San Jose, CA (United States), 8-14 Feb 1997; Other Information: PBD: [1997]
Research Org:Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org:USDOE, Washington, DC (United States)
Country of Publication:United States
Language:English
Subject: 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; ALUMINIUM ARSENIDES; GALLIUM ARSENIDES; LASERS; SEMICONDUCTOR LASERS; FABRICATION