Sensor-based navigation control and calibration of a wafer-handling mobile robot
- Samsung Electronics, Suwon (Korea, Republic of)
In this paper, the authors propose a mobile robot composed of a free-ranging automated guided vehicle and a manipulator with six degrees of freedom, which is mounted on the vehicle. In navigation in the semiconductor manufacturing line, the mobile robot utilizes the predefined map representing the route to move in the working area with clean class 1. The map and the information about the task to be performed is transmitted to the main controller of the mobile robot through R/F communication. In navigation, the mobile robot uses the fuzzy control algorithm based on the data from the sonar sensors attached to both right and left sides of the vehicle to maintain the positioning accuracy within {+-}1 cm. The mobile robot automatically calibrates the setting position of the manipulator to calculate the exact destination point where the given task should be carried out. Then, the manipulator loads the equipment with wafer-carriers or unloads wafer-carriers from the equipment in the semiconductor manufacturing line. By the proposed navigation algorithm based on fuzzy control and the calibration algorithm of the manipulator, the mobile robot efficiently carries out the given task in the semiconductor manufacturing line.
- OSTI ID:
- 427887
- Report Number(s):
- CONF-9510203-; TRN: IM9708%%214
- Resource Relation:
- Conference: IEEE/Industrial Application Society conference, Orlando, FL (United States), 8-12 Oct 1995; Other Information: PBD: 1995; Related Information: Is Part Of Conference record of the 1995 IEEE Industry Applications Society 30. IAS annual meeting. Volume 3; PB: 961 p.
- Country of Publication:
- United States
- Language:
- English
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