Hydrogen treatment of undoped ZnO thin film using photo-chemical vapor deposition

Book · Tue Dec 31 00:00:00 EST 1996

OSTI ID:417709

Baik, S J; Lim, K S ^[1]; Song, J ^[2]

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1. KAIST, Taejon (Korea, Republic of). Dept. of Electrical Engineering
2. KIER, Taejon (Korea, Republic of). Dept. of Photovoltaic Research Team

To obtain high quality ZnO thin films for use as transparent electrodes of amorphous silicon solar cells, hydrogen treatment of the films using photo-chemical vapor deposition was performed for the first time. The as-deposited ZnO thin film was irradiated by UV light during the flow of hydrogen molecules in the presence of photo-sensitizers of mercury. As the treatment time increased, resistivity decreased from 1 {times} 10{sup {minus}2}{Omega}cm to 2 {times} 10{sup {minus}3}{Omega}cm. Moreover, haze ratio increased from 20% to 48%. Hydrogen radicals were thought to be playing various roles on the neighborhood of the surface region and the grain boundary region. This new trial gave us new understanding into the relation between hydrogen and ZnO. Moreover, these results could be applied to the process of amorphous silicon solar cells and a possible increase of efficiency is expected.

• OSTI ID: 417709
• Report Number(s): CONF-960401-; ISBN 1-55899-329-0; TRN: IM9705%%82
• Resource Relation: Conference: Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 8-12 Apr 1996; Other Information: PBD: 1996; Related Information: Is Part Of Thin films for photovoltaic and related device applications; Ginley, D. [ed.] [National Renewable Energy Lab., Golden, CO (United States)]; Catalano, A. [ed.] [Technology Assessment Group, Boulder, CO (United States)]; Schock, H.W. [ed.] [Univ. Stuttgart (Germany)]; Eberspacher, C. [ed.] [Unisun, Newbury Park, CA (United States)]; Peterson, T.M. [ed.] [Electric Power Research Inst., Palo Alto, CA (United States)]; Wada, Takahiro [ed.] [Matsushita Electric Industries Co., Ltd., Kyoto (Japan)]; PB: 621 p.; Materials Research Society symposium proceedings, Volume 426
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
14 SOLAR ENERGY
ZINC OXIDES
CHEMICAL VAPOR DEPOSITION
MICROSTRUCTURE
ELECTRICAL PROPERTIES
OPTICAL PROPERTIES
SILICON SOLAR CELLS
MATERIALS
ULTRAVIOLET RADIATION
PHOTOCHEMICAL REACTIONS
TIME DEPENDENCE
ELECTRIC CONDUCTIVITY
HALL EFFECT
CARRIER MOBILITY
SCANNING ELECTRON MICROSCOPY
X-RAY DIFFRACTION
GRAIN SIZE
EXPERIMENTAL DATA