Optical processing furnace with quartz muffle and diffuser plate

Patent · Tue Nov 19 00:00:00 EST 1996

OSTI ID:403665

Sopori, B. L.

An optical furnace for annealing a process wafer is disclosed comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy. 5 figs.

• Research Organization: National Renewable Energy Laboratory (NREL), Golden, CO (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC02-83CH10093
• Assignee: Midwest Research Inst., Kansas City, MO (United States)
• Patent Number(s): US 5,577,157/A/
• Application Number: PAN: 8-462,752
• OSTI ID: 403665
• Resource Relation: Other Information: PBD: 19 Nov 1996
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
SEMICONDUCTOR MATERIALS
ANNEALING
FURNACES
DESIGN
MATERIALS HANDLING EQUIPMENT
VISIBLE RADIATION
MONITORS
CONTROL EQUIPMENT
LIGHT SOURCES