Infrared absorption and electron spin resonance studies of nanocrystalline cubic boron nitride/amorphous hydrogenated boron nitride mixed phase thin films

Book · Fri Nov 01 00:00:00 EST 1996

OSTI ID:395021

Lin, S H; Brown, I M; Feldman, B J ^[1]

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1. Univ. of Missouri, St. Louis, MO (United States)

Both infrared absorption (IR) and electron spin resonance (ESR) spectroscopies have been used to investigate the complicated structure of nanocrystalline cubic boron nitride/amorphous hydrogenated boron nitride thin films. The ESR spectra from this material consist of a component with a four-line hyperfine structure and/or a component with a ten-line hyperfine structure superimposed upon a broad central line. The hyperfine structures are associated with defect centers located in the nanocrystalline phase, whereas the broad line is attributed to dangling bonds in the amorphous phase. The IR spectra consist of three lines around 1,400 cm{sup {minus}1}: the lines at 1,263 and 1,505 cm{sup {minus}1} originate in a boron-poor amorphous hydrogenated boron nitride region; the line at 1,371 cm{sup {minus}1}, in a boron-rich amorphous hydrogenated boron nitride region. These results, together with previously reported electron diffraction spectra, suggest the following picture: small (2.5 nm) nanocrystallites of cubic boron nitride (about 5% of the material) are imbedded in a mixed amorphous phase. The amorphous region can be approximated by a mixture of boron-rich and boron-poor amorphous hydrogenated boron nitride.

• OSTI ID: 395021
• Report Number(s): CONF-951155-; ISBN 1-55899-298-7; TRN: IM9648%%98
• Resource Relation: Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: 1996; Related Information: Is Part Of Gallium nitride and related materials; Ponce, F.A. [ed.] [Xerox Palo Alto Research Center, CA (United States)]; Dupuis, R.D. [ed.] [Univ. of Texas, Austin, TX (United States)]; Nakamura, S. [ed.] [Nichia Chemical Industries, Tokushima (Japan)]; Edmond, J.A. [ed.] [Cree Research, Inc., Durham, NC (United States)]; PB: 993 p.; Materials Research Society symposium proceedings, Volume 395
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
BORON NITRIDES
CHEMICAL VAPOR DEPOSITION
MICROSTRUCTURE
OPTICAL EQUIPMENT
SEMICONDUCTOR MATERIALS
ELECTRONIC EQUIPMENT
BORANES
AMMONIA
HYDROGEN
CUBIC LATTICES
AMORPHOUS STATE
CRYSTAL DEFECTS
TEMPERATURE DEPENDENCE
EXPERIMENTAL DATA