Magnetic probe (B-dot) measurements in an inductively coupled plasma (ICP): Techniques and results
Conference
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OSTI ID:346855
- Osram Sylvania, Inc., Beverly, MA (United States)
There has been a considerable amount of study of ICP sources in recent years because these discharges have been found to be useful in plasma processing and light source applications. In view of their practical relevance, the authors have made a fairly extensive experimental study of ICP sources using B-dot (dB/dt) probes to measure the magnitude and phase of the magnetic field (as well as Langmuir probes to measure the electron energy distribution function). The measurements span gas pressures ranging between 0.3 and 300 mTorr, discharge powers ranging between 25 and 200W and include three driving frequencies: 3.39, 6.78 and 13.56 MHz. This talk is based mainly upon these measurements.
- OSTI ID:
- 346855
- Report Number(s):
- CONF-980601-; TRN: IM9920%%72
- Resource Relation:
- Conference: 25. international conference on plasma science, Raleigh, NC (United States), 1-4 Jun 1998; Other Information: PBD: 1998; Related Information: Is Part Of IEEE conference record -- Abstracts. 1998 IEEE international conference on plasma science; PB: 343 p.
- Country of Publication:
- United States
- Language:
- English
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