Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication
Patent
·
OSTI ID:321227
A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing. 8 figs.
- Research Organization:
- Univ. of California (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- Univ. of California, Oakland, CA (United States)
- Patent Number(s):
- US 5,841,236/A/
- Application Number:
- PAN: 8-326,667
- OSTI ID:
- 321227
- Resource Relation:
- Other Information: PBD: 24 Nov 1998
- Country of Publication:
- United States
- Language:
- English
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