Monitoring of surface minority carrier lifetime using modulated photocurrent
- SemiTest, Inc., Billerica, MA (United States)
Effective minority carrier recombination lifetime may vary substantially depending on measurement techniques and sample parameters not directly related to the recombination process. This makes it difficult to measure the bulk recombination lifetime and the surface recombination velocity--the fundamental parameters affecting the recombination of minority carriers in the semiconductor. At the same time, effective lifetime can be used as an efficient monitor of contamination, particularly when combined with statistical process control (SPC). Effective lifetime as measured by the Surface Charge Analyzer SCA-2500 is strongly affected by the surface conditions of the sample and thus is particularly sensitive to surface contamination. No sample preparation is required for the measurements. These features have proven the usefulness of SCA-2500 as an in-line contamination monitor in the production environment.
- OSTI ID:
- 316194
- Report Number(s):
- CONF-9706298-; ISBN 0-8031-2489-9; TRN: IM9908%%274
- Resource Relation:
- Conference: Advanced workshop on silicon recombination lifetime characterization methods, Santa Clara, CA (United States), 2-3 Jun 1997; Other Information: PBD: 1998; Related Information: Is Part Of Recombination lifetime measurements in silicon; Gupta, D. [ed.] [Mitsubishi Silicon America, Palo Alto, CA (United States)]; Bacher, F.R. [ed.] [Wacker Siltronic Corp., Portland, OR (United States)]; Hughes, W. [ed.] [MEMC Electronics Materials Inc., St. Peters, MO (United States)]; PB: 399 p.; ASTM special technical publication, Volume 1340
- Country of Publication:
- United States
- Language:
- English
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