Optical hydrogen sensor using Pd/MoO{sub x} films
- Nagaoka Univ. of Technology, Niigata (Japan)
An optical hydrogen sensor which colors under an H{sub 2}-atmosphere is prepared. The sensor consists of a molybdenum oxide (MoO{sub x}) layer (500-1300 nm) on a glass substrate covered with a very thin palladium layer of about 10 nm. Both layers are deposited by radio-frequency magnetron sputtering. The sputtering of the MoO{sub x} films is carried out in a mixed Ar-O{sub 2} atmosphere using a molybdenum metal plate as the target. The relationship between the hydrogen gas sensing properties and oxygen content in the MoO{sub x} film is examined. The oxygen content in the films, estimated by X-ray photoelectron spectroscopy (XPS), increases with the oxygen concentration in the sputtering gas. For amorphous MoO{sub x} films the initial coloration rate slightly increased with the oxygen concentration in the films. The initial coloration rate for the crystalline MoO{sub 3} film, obtained by sputtering in an oxygen atmosphere, was 7 times higher than the one for the amorphous MoO{sub x} films.
- OSTI ID:
- 28849
- Report Number(s):
- CONF-931142-; TRN: 94:010156-0032
- Resource Relation:
- Conference: 1. meeting of the Pacific Rim ceramic societies, Honolulu, HI (United States), 7-10 Nov 1993; Other Information: PBD: 1994; Related Information: Is Part Of Ceramic transactions: Ferroic materials - design, preparation, and characteristics. Volume 43; Bhalla, A.S.; Nair, K.M.; Lloyd, I.K.; Yanagida, H.; Payne, D.A. [eds.]; PB: 438 p.
- Country of Publication:
- United States
- Language:
- English
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